spectroscopic ellipsometrySENresearch 4.0

Wide spectral range and high spectral accuracy

The SENresearch 4.0 spectroscopic ellipsometer covers a wide spectral range, from 190 nm (deep ultraviolet) to 3500 nm (near-infrared). The Fourier transform infrared spectrometer (FTIR) provides high spectral resolution for analyzing thick films up to 200 μ m.

No optical device movement (principle of step scan analyzer)

In order to obtain measurement results, there was no movement of optical components during the data acquisition process. The principle of the step scan analyzer (SSA) is a unique feature of the SENresearch 4.0 spectroscopic ellipsometer.

Double compensator 2C full Mueller matrix measurement

The innovative dual compensator 2C design extends the principle of the step scan analyzer SSA, allowing for the measurement of the entire Mueller matrix. This design is an attachment that can be upgraded on-site and achieve cost-effectiveness.

SpectraRay/4 comprehensive ellipsometer software

SpectraRay/4 is a fully functional software package for advanced material analysis. SpectraRay/4 includes interactive modes for studying with guided graphical user interfaces and recipe modes for general applications

Low cost and high efficiency spectroscopic ellipsometerSENpro

Cost effectiveness

SENpro is a cost-effective spectroscopic ellipsometer that does not compromise advanced measurement performance.

Variable incidence angle

The spectral ellipsometer SENpro includes an angle meter with variable incidence angle, ranging from 40 ° to 90 °, with a step value of 5 °, used to optimize ellipsometry measurements.

Step by step scanning analyzer

SENpro has a unique step scan analyzer. During the data acquisition process, polarizers and compensators are fixed to provide high ellipsometry measurement accuracy.